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Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 by S. Joshua Jacobs, Eric Peeters, Arthur H. Heuer, Maarten P. de Boer (Paperback, 2014)
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Fluid interactions are similarly important for microfluidic devices. Short Title MATERIALS SCIENCE OF MICROELEC. The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.